An Inversely Designed Model for Calculating Pull-In Limit and Position of Electrostatic Fixed-Fixed Beam Actuators

Table 2

Comparison of Voltage Values for Arbitrary Displacements.  GPa,  μm,  μm, and  μm.

Displacement; (m)	Voltage (Volt); IPM (9)	Voltage (Volt); COMSOL	Δ%
0.0116	4.9518	5	0.97
0.0493	9.9076	10	0.93
0.0739	11.8935	12	0.90
0.1062	13.8822	14	0.85
0.1496	15.8724	16	0.80
0.1775	16.8617	17	0.82
0.2125	17.8567	18	0.80
0.2594	18.8394	19	0.85
0.3445	19.8053	20	0.98
0.3891	19.9634	20.19	1.14