An Inversely Designed Model for Calculating Pull-In Limit and Position of Electrostatic Fixed-Fixed Beam Actuators

Table 5

Comparison of IPM and IPMF with previous simulation results [12].  μm,  GPa, ,  μm,  μm and  μm in each case.

Residual Stress, , (MPa)	0
CoSolve FEA [17]	41.20
V (2D) [17] (Δ%)	41.50 (0.73%)
[18] (Δ%)	42.54 (3.25%)
[19] (Δ%)	41.20 (0.00%)
[20] (Δ%)	41.42 (0.53%)
OCI Model [12]	41.72 (1.26%)
IPM (Δ%)	41.53 (0.80%)
IPMF (Δ%)	41.23 (0.07%)