An Inversely Designed Model for Calculating Pull-In Limit and Position of Electrostatic Fixed-Fixed Beam Actuators

Table 6

Pull-in Voltage Comparison of IPMF to simulation results for Poly-Si material from COMSOL library.  GPa, and  μm for all cases.

Residual Stress, , (MPa)	COMSOL (V)	IPMF (V)	(Δ%)
m, m, m, Number of Meshes = 7533
0	134.70	132.53	1.61
−25	130.30	127.74	1.96
100	150.00	150.18	0.12
m,  m, m, Number of Meshes = 4467
0	33.60	33.13	1.40
−25	29.00	28.40	2.07
100	47.50	47.55	0.11
m, m, m, Number of Meshes = 3531
0	78.30	76.52	2.27
−25	67.90	68.49	0.87
100	109.00	102.51	5.95
m, m, m, Number of Meshes = 2817
0	44.01	43.04	2.20
−25	34.00	34.88	2.59
100	72.00	66.30	7.92
m, m, m, Number of Meshes = 3259
0	42.83	42.41	0.98
−25	33.30	32.71	1.77
100	68.10	68.64	0.79
m, m, m, Number of Meshes = 1782
0	49.10	48.39	1.45
−25	32.80	34.99	6.68
100	87.00	82.53	5.14