An Inversely Designed Model for Calculating Pull-In Limit and Position of Electrostatic Fixed-Fixed Beam Actuators

Table 7

Comparison of IPMF to simulation results for the variety of widths.  GPa, and  μm for all cases.

Width, , (m)	COMSOL (V)	IPMF (V)	(Δ%)
m,  m,  m
50	33.60	33.13	1.40
20	33.30	33.13	0.51
10	33.10	33.13	0.09
5	32.90	33.13	0.70
2	32.60	33.13	1.63
1	32.20	33.13	2.89
m,  m, m
50	42.83	42.41	0.98
20	42.30	42.41	0.26
10	42.10	42.41	0.74
5	41.80	42.41	1.46
2	41.40	42.41	2.44
1	41.00	42.41	3.44