An Inversely Designed Model for Calculating Pull-In Limit and Position of Electrostatic Fixed-Fixed Beam Actuators

Table 8

Comparison of IPMF to simulation results for the variety of initial gaps.  GPa, and  μm for all cases.

Gap, , (µm)	COMSOL (V)	IPMF (V)	(Δ%)
m,  m, m
1	33.60	33.13	1.40
2	99.50	93.71	5.82
3	196.00	172.17	12.16
5	520.00	370.45	28.76
m, m, m
2	42.83	42.41	0.98
3	79.80	77.91	2.37
4	126.00	119.95	4.81
6	249.00	220.38	11.49