Development of a Flat Type Six-Axis Stage Based on Piezoelectric Actuators

<table>When the stage rotates along <svg height="13.2009pt" id="M117" style="vertical-align:-3.523pt" version="1.1" viewbox="-0.0498162 -9.6779 16.4732 13.2009" width="16.4732pt" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink"><g transform="matrix(.0135,0,0,-0.0135,0,0)"><path d="M475 507C475 612 440 712 326 712C139 712 23 420 23 215C23 96 58 -12 180 -12C369 -12 475 293 475 507ZM391 522C391 486 387 448 379 394H126C155 538 222 677 310 677C386 677 391 571 391 522ZM373 346C344 193 283 22 189 22C126 22 106 114 106 196C106 243 111 293 118 346H373Z" id="g113-230"></path><glyph.data ascent="3473" descent="-2876" horiz-adv-x="498" vert-adv-y="498"></glyph.data></g><g transform="matrix(.0095,0,0,-0.0095,6.408,3.264)"><path d="M481 445L456 468C426 437 403 427 388 427C372 427 356 428 302 438C256 447 221 451 187 451C159 451 130 428 105 384C93 363 80 340 65 305L96 290C122 342 149 381 193 381C216 381 267 377 294 374S346 372 365 376L75 105C37 70 24 35 24 16C24 2 30 -5 35 -8C42 -8 46 -6 48 -2C58 14 75 35 90 41C102 46 116 46 147 32C200 8 267 -21 298 -21C347 -21 390 12 448 126L420 151C369 77 338 56 311 56C287 56 249 68 212 81C180 92 149 100 127 98C212 172 353 308 413 372L481 445Z" id="g50-123"></path><glyph.data ascent="3443" descent="-2856" horiz-adv-x="505" vert-adv-y="505"></glyph.data></g><g transform="matrix(.0095,0,0,-0.0095,11.198,3.264)"><path d="M389 0V32C297 38 291 46 291 118V635C234 613 175 595 109 583V556L161 554C203 552 207 547 207 497V118C207 46 201 38 110 32V0H389Z" id="g50-50"></path><glyph.data ascent="3443" descent="-2856" horiz-adv-x="487" vert-adv-y="487"></glyph.data></g></svg>, <svg height="6.42315pt" id="M118" style="vertical-align:-0.2129903pt" version="1.1" viewbox="-0.0498162 -6.21016 7.70145 6.42315" width="7.70145pt" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink"><g transform="matrix(.0135,0,0,-0.0135,0,0)"><path d="M536 404C536 423 520 448 491 448C445 448 398 404 308 283L286 338C255 416 242 448 217 448C182 448 138 402 92 341L111 321C149 368 169 378 178 378C188 378 198 363 214 320L254 212C185 117 138 65 107 65C98 65 85 69 82 75C79 82 73 86 65 86C44 86 23 60 23 39C23 7 44 -12 71 -12C119 -12 168 33 265 177L306 61C321 17 347 -12 373 -12C413 -12 465 33 507 96L491 119C459 84 432 60 413 60C395 60 378 92 358 148L321 250C341 279 369 310 389 332C417 363 439 382 456 382C466 382 475 376 481 368C486 361 492 358 496 358C513 358 536 381 536 404Z" id="g113-121"></path><glyph.data ascent="3473" descent="-2876" horiz-adv-x="559" vert-adv-y="559"></glyph.data></g></svg>-axis movement produces a displacement component of the <svg height="9.7821pt" id="M119" style="vertical-align:-3.57194pt" version="1.1" viewbox="-0.0498162 -6.21016 7.97344 9.7821" width="7.97344pt" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink"><g transform="matrix(.0135,0,0,-0.0135,0,0)"><path d="M556 393C556 426 537 448 514 448C496 448 478 435 471 420C468 414 462 401 466 394C473 382 480 368 480 346C480 268 392 143 338 67H336C329 163 319 253 309 330S286 448 254 448C215 448 160 383 127 337L143 311C167 344 200 373 208 373S222 365 229 320C246 214 264 66 268 -20C219 -83 131 -171 17 -239L25 -261L137 -235C248 -110 273 -79 335 8C384 77 481 215 520 287C544 332 556 363 556 393Z" id="g113-122"></path><glyph.data ascent="3473" descent="-2876" horiz-adv-x="579" vert-adv-y="579"></glyph.data></g></svg>-axis.</table>

Mathematical Problems in Engineering

fig8

Figure 8

Figure 8: Development of a Flat Type Six-Axis Stage Based on Piezoelectric Actuators 