Modeling and Characteristic Study of Thin Film Based Biosensor Based on COMSOL
Figure 4
The response of lowest sensitivity pertinent to tetrapolar electrode system to the change of (a) distance between electrodes (width of electrodes: 5 μm; length of electrodes: 20 μm; thickness of electrodes: 100 nm) and (b) width of inner electrodes (width of outer electrodes: 5 μm; thickness of electrodes: 100 nm; length of electrodes: 20 μm; distance between electrodes: 10 μm).
