Nonlinear Analysis of Actuation Performance of Shape Memory Alloy Composite Film Based on Silicon Substrate

Table 1

Material properties of NiTi-SMA and Si [7].

NiTi SMA	𝑀𝑓=23 °C	𝐶𝑀=11.3 MPa/°C
	𝑀𝑠=50 °C	𝐶𝐴=4.5 MPa/°C
	𝐴𝑠=62 °C	𝐷𝑀=13 GPa
	𝐴𝑓=100 °C	𝐷𝐴=30 GPa
	𝛼=8.8×10^−6/°C	𝜀𝐿=1%
Si	𝐸𝑚=180.5 GPa	𝛼𝑚=2.33×10^−6/°C