Modeling the Boron-Doping Silicon Beam by a Multilayer Model

Table 2

Rigidity constants of beams.

Beams	Young’s modulus	COMSOL	FEL	Relative error
	𝐸, GPa	kN/m	kN/m
1	169	1.292	1.372	6.19%
2	200	1.529	1.624	6.21%
3	Gauss	1.417	1.478	4.28%