Research Article
Pull-In Analysis of the Flat Circular CMUT Cell Featuring Sealed Cavity
Table 2
Material properties of the CMUT.
| | | Au | Si3N4 | SiO2 |
| | Young’s Modulus/GPa | 70 | 320 | 70 | | Density/g/cm3 | 19.3 | 3.27 | 2.2 | | Poisson’s ratio | 0.44 | 0.263 | 0.17 | | Relative permittivity | — | 5.7 | 4.2 |
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