Pull-In Analysis of the Flat Circular CMUT Cell Featuring Sealed Cavity

Table 3

Comparisons of the maximum and average deflections without biased voltage.

	/nm			/nm
	New model	FEM	Relative error	New model	FEM	Relative error
0	131.475	127.690	2.964%	43.825	42.935	2.073%
0.1	117.327	115.020	2.006%	39.109	38.668	1.141%
0.2	103.180	102.310	0.850%	34.393	34.391	0.006%
0.3	91.032	89.568	1.635%	30.344	30.106	0.790%
0.4	78.885	76.805	2.708%	26.295	25.814	1.862%
0.5	64.737	64.023	1.116%	21.579	21.517	0.289%
0.6	52.590	51.226	2.662%	17.530	17.215	1.827%
0.7	39.442	38.420	2.661%	13.147	12.911	1.829%
0.8	26.295	25.609	2.678%	8.765	8.606	1.846%
0.9	13.147	12.800	2.715%	4.382	4.301	1.891%
1	0	4.2421e − 4	—	0	0.002	—