Pull-In Analysis of the Flat Circular CMUT Cell Featuring Sealed Cavity

Table 4

Pull-in voltage comparison of analytical to simulation results for the variety of pressure ratios.

	The pull-in ratio			/V
	New model	FEM	Relative error	New model	FEM	Relative error
0	0.538	0.558	−3.636%	170.737	162.563	5.028%
0.1	0.531	0.537	−1.154%	174.143	166.250	4.748%
0.2	0.524	0.521	0.518%	177.559	170.273	4.279%
0.3	0.517	0.509	1.612%	181.000	178.500	1.400%
0.4	0.509	0.508	0.177%	184.461	188.135	−1.953%
0.5	0.502	0.503	−0.100%	187.931	192.572	−2.410%
0.6	0.495	0.501	−1.217%	191.412	195.426	−2.054%
0.7	0.488	0.503	−3.021%	194.924	197.962	−1.535%
0.8	0.480	0.502	−4.363%	198.447	200.523	−1.035%
0.9	0.473	0.501	−5.645%	201.980	202.750	−0.380%
1	0.466	0.501	−6.986%	205.529	204.558	0.475%