Research Article

A Novel Time-Varying Friction Compensation Method for Servomechanism

Table 1

Main specifications of high-precision X-Y worktable.

ParameterValue

Worktable area (mm×mm)560 × 420
stroke (mm×mm)250 × 150
Maximum allowed acceleration (mm·s−2)1500
Inertia of the plant for -axis (kg·m2)0.00298
Inertia of the plant for -axis (kg·m2)0.00358
Torque constant (N·m·V−1)2.68
Rated torque of servo motor (N·m)7.16
Sampling period (s)0.001
Screw lead (mm)16
Resolution of encoder (m)0.5
Resolution of scale (m)0.5