Research Article
On Synergistic Integration of Adaptive Dithering Based Internal Model Control for Hysteresis Compensation in Piezoactuated Nanopositioner
Table 5
Two-dimensional RMS circular contouring errors of the XY parallel manipulator characterized with FFT + IMC system.
| | Amplitude (in μm) | Frequency | | 0.25 Hz | 0.5 Hz | | 60° | 90° | 60° | 90° | | SD (in μm) | RMS (in μm) | SD (in μm) | RMS (in μm) | SD (in μm) | RMS (in μm) | SD (in μm) | RMS (in μm) |
| | 90 | 1.6870 | 2.4082 | 3.1382 | 4.3444 | 2.8907 | 4.1966 | 3.6637 | 5.2472 | | 110 | 2.1983 | 3.2892 | 4.0007 | 5.8545 | 2.9940 | 4.5494 | 4.2325 | 6.1203 | | 130 | 2.7655 | 4.2892 | 4.9359 | 7.5611 | 3.2066 | 5.0181 | 4.9769 | 7.1799 |
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