On Synergistic Integration of Adaptive Dithering Based Internal Model Control for Hysteresis Compensation in Piezoactuated Nanopositioner

Table 6

RMS tracking error comparison between FF + FB system and FFT + IMC system for plant parametric variations.

	+2% variation		−2% variation		Variation range
	FF + FB	FFT + IMC	FF + FB	FFT + IMC	FF + FB	FFT + IMC
Dynamic parameters
	31.911 nm	31.073 nm	29.896 nm	31.911 nm	2.015 nm	0.838 nm
	362.97 nm	374.09 nm	405.81 nm	394.14 nm	42.84 nm	20.05 nm
	1070.1 nm	1051.3 nm	1179.8 nm	1141.3 nm	109.7 nm	90 nm
	1260 nm	1238.9 nm	1230.4 nm	1220.2 nm	29.6 nm	18.7 nm
Hysteretic parameters
	38.106 nm	31.577 nm	34.672 nm	29.365 nm	3.434 nm	2.212 nm
	33.475 nm	30.406 nm	40.484 nm	30.193 nm	7.009 nm	0.213 nm
	82.135 nm	94.582 nm	121.51 nm	108.73 nm	39.375 nm	14.23 nm
	82.191 nm	77.489 nm	150.08 nm	134.38 nm	67.889 nm	56.891 nm