Three-Stage Tracking Control for the LED Wafer Transporting Robot

<table class="figure-group"><tr class="fig-image" id="a"><td><object data="https://static.hindawi.com/articles/mpe/volume-2015/365206/figures/365206.fig.006a.svgz" name="365206.fig.006a" type="image/svg+xml"></object></td></tr><tr class="fig-caption"><td><b>(a) </b>Position curve of the transporting robot</td></tr><tr class="fig-image" id="b"><td><object data="https://static.hindawi.com/articles/mpe/volume-2015/365206/figures/365206.fig.006b.svgz" name="365206.fig.006b" type="image/svg+xml"></object></td></tr><tr class="fig-caption"><td><b>(b) </b>Velocity curve of the transporting robot</td></tr><tr class="fig-image" id="c"><td><object data="https://static.hindawi.com/articles/mpe/volume-2015/365206/figures/365206.fig.006c.svgz" name="365206.fig.006c" type="image/svg+xml"></object></td></tr><tr class="fig-caption"><td><b>(c) </b>Acceleration curve of the transporting robot</td></tr></table>

<div>Tracking control experiment curve of the LED wafer transporting robot.</div>

Mathematical Problems in Engineering

fig6

Figure 6

Figure 6: Three-Stage Tracking Control for the LED Wafer Transporting Robot 