Three-Stage Tracking Control for the LED Wafer Transporting Robot

Table 1

The mechanical parameters of the motor.

Rated torque	Torque constant	Rotation inertia	Rated acceleration	Damping coefficient
2.03 N⋅m	0.926 N⋅m/A	53.321 × 10^−4 kgm^2	36700 rad/s^2	9.361 × 10^−5 Nms/rad