Control of Bouncing in MEMS Switches Using Double Electrodes

Table 1

The parameters used in the lumped parameter model based on the case study done in [5]. In the table, the word “free” means without contact (with subscript ) while and refer to the natural frequency and damping ratios in the presence of contact with the substrate. The constant is based on the permittivity of air, area of the beam, and mass of the beam.

Parameter	Value
Natural frequency free (	2.1 × 10^4 [Hz]
Damping free (	2 × 10^−2
Gap (	3.8 × 10^−6 [m]
Maximum distance to travel	2.6 × 10^−6 [m]
Constant (εA/2m)	1.9 × 10^−11 [F⋅m/kg]
Effective spring constant	42 [N/m]
Natural frequency during contact (	6.1 × 10^4 [Hz]
Damping ratio during contact (	2 × 10^−1