Control of Bouncing in MEMS Switches Using Double Electrodes

<table class="table-group" id="tab2"><tr><td><table class="table"><tr><td class="thead-hr" colspan="3"><hr/></td></tr><tr class="thead"><td class="align_left">Actuation voltage</td><td class="align_center">Control voltage</td><td class="align_center">Pulse width</td></tr><tr><td class="thead-hr" colspan="3"><hr/></td></tr><tr><td class="align_left">30 V</td><td class="align_center">20 V</td><td class="align_center">14 <i>μ</i>s</td></tr><tr class="table-tr"><td colspan="3"><hr class="tbody-hr"/></td></tr></table></td></tr></table>

Parameters used for studying pulse position using the lumped model.

Mathematical Problems in Engineering

tab2

Table 2

Table 2: Control of Bouncing in MEMS Switches Using Double Electrodes 