Control of Bouncing in MEMS Switches Using Double Electrodes

<table class="table-group" id="tab3"><tr><td><table class="table"><tr><td class="thead-hr" colspan="3"><hr/></td></tr><tr class="thead"><td class="align_left">Pulse position</td><td class="align_center">Control voltage</td><td class="align_center">Pulse width</td></tr><tr><td class="thead-hr" colspan="3"><hr/></td></tr><tr><td class="align_left">17 <i>μ</i>s</td><td class="align_center">20 V</td><td class="align_center">14 <i>μ</i>s</td></tr><tr class="table-tr"><td colspan="3"><hr class="tbody-hr"/></td></tr></table></td></tr></table>

The parameters used for studying the actuation voltage.

Mathematical Problems in Engineering

tab3

Table 3

Table 3: Control of Bouncing in MEMS Switches Using Double Electrodes 