Research Article
Control of Bouncing in MEMS Switches Using Double Electrodes
Table 5
Parameters used for the beam model [
2].
| Parameter | Value |
| Length | 70 [μm] | Width | 30 [μm] | Thickness | 2 [μm] | Gap ( | 1.5 [μm] | Max distance ( | 0.75 [μm] | Electrode position | 21 [μm] to 49 [μm] | Young’s modulus () | 207 [GPa] | Density | 8900 [kg/] |
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