Control of Bouncing in MEMS Switches Using Double Electrodes

Table 5

Parameters used for the beam model [2].

Parameter	Value
Length	70 [μm]
Width	30 [μm]
Thickness	2 [μm]
Gap (	1.5 [μm]
Max distance (	0.75 [μm]
Electrode position	21 [μm] to 49 [μm]
Young’s modulus ()	207 [GPa]
Density	8900 [kg/]