Control of Bouncing in MEMS Switches Using Double Electrodes

<table class="table-group" id="tab6"><tr><td><table class="table"><tr><td class="thead-hr" colspan="4"><hr/></td></tr><tr class="thead"><td class="align_left">Actuation voltage</td><td class="align_center">Control voltage</td><td class="align_center">Pulse width</td><td class="align_center">Pulse position</td></tr><tr><td class="thead-hr" colspan="4"><hr/></td></tr><tr><td class="align_left">300 V</td><td class="align_center">200 V</td><td class="align_center">0.13 <i>μ</i>s</td><td class="align_center">0.36 <i>μ</i>s</td></tr><tr class="table-tr"><td colspan="4"><hr class="tbody-hr"/></td></tr></table></td></tr></table>

Parameters used for obtaining tuned system.

Mathematical Problems in Engineering

tab6

Table 6

Table 6: Control of Bouncing in MEMS Switches Using Double Electrodes 