An Ultra-Low Frequency Two DOFs’ Vibration Isolator Using Positive and Negative Stiffness in Parallel

Table 6

The static stability of payload platform.

Static stability	H1	H2	H3	V1	V2	V3
Positive deviation (+)	2.5 μm	1.0 μm	2.0 μm	2.0 μm	1.0 μm	2.0 μm
Negative deviation (−)	3.0 μm	1.5 μm	2.0 μm	2.5 μm	1.0 μm	1.5 μm