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Mathematical Problems in Engineering
Volume 2017, Article ID 1262650, 14 pages
Research Article

Dynamic Analysis of Multilayers Based MEMS Resonators

1Department of Mechanical Engineering, King Fahd University of Petroleum and Minerals, Dhahran 31261, Saudi Arabia
2Mechanical Engineering Department, University of Maryland, College Park, MD 20742, USA
3Department of Engineering Science and Mechanics, Virginia Polytechnic Institute and State University, Blacksburg, VA 24061, USA
4Department of Mechanical Engineering, University of Jordan, Amman, Jordan

Correspondence should be addressed to Hassen M. Ouakad; as.ude.mpufk@dakauoh

Received 28 September 2016; Revised 20 November 2016; Accepted 30 November 2016; Published 5 January 2017

Academic Editor: Angelo Di Egidio

Copyright © 2017 Hassen M. Ouakad et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.


The dynamic behavior of a microelectromechanical system (MEMS) parallel and electrically coupled double-layers (microbeams) based resonator is investigated. Two numerical methods were used to solve the dynamical problem: the reduced-order modeling (ROM) and the perturbation method. The ROM was derived using the so-called Galerkin expansion with considering the linear undamped mode shapes of straight beam as the basis functions. The perturbation method was generated using the method of multiple scales by direct attack of the equations of motion. Dynamic analyses, assuming the above two numerical methods were performed, and a comparison of the results showed good agreement. Finally, a parametric study was performed using the perturbation on different parameters and the results revealed different interesting features, which hopefully can be useful for some MEMS based applications.