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Mathematical Problems in Engineering
Volume 2017 (2017), Article ID 1262650, 14 pages
https://doi.org/10.1155/2017/1262650
Research Article

Dynamic Analysis of Multilayers Based MEMS Resonators

1Department of Mechanical Engineering, King Fahd University of Petroleum and Minerals, Dhahran 31261, Saudi Arabia
2Mechanical Engineering Department, University of Maryland, College Park, MD 20742, USA
3Department of Engineering Science and Mechanics, Virginia Polytechnic Institute and State University, Blacksburg, VA 24061, USA
4Department of Mechanical Engineering, University of Jordan, Amman, Jordan

Correspondence should be addressed to Hassen M. Ouakad

Received 28 September 2016; Revised 20 November 2016; Accepted 30 November 2016; Published 5 January 2017

Academic Editor: Angelo Di Egidio

Copyright © 2017 Hassen M. Ouakad et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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