Research Article

Sampling Schemes by Variables Inspection for the First-Order Autoregressive Model between Linear Profiles

Table 3

Equivalent alternative sampling plans for line-width measurement.

EWMAResubmitted
()
RGSMDS ()Single variable

λ = 0.1273
= 26
= 1.4057
= 0.9519
= 0.0961
ASN = 26
= 46
= 1.4595
= 2
= 0.9518
= 0.0913
ASN = 56.1
= 50
= 1.3887
= 1.2806
= 0.9502
= 0.0940
ASN = 58
k = 46
l = 2
= 1.3827
= 1.1491
= 0.9504
= 0.0968
ASN = 50
k = 53
= 1.4363
= 0.9503
= 0.0999
ASN = 53