A Two-Step Global Maximum Error Controller-Based TPWL MOR with POD Basis Vectors and Its Applications to MEMS

Table 5

Geometric parameters of a single leg-pair.

Structure parameter	Value
Length of shuttle	μm
Width of shuttle	μm
Thickness of shuttle	μm
Length of leg	μm
Width of leg	μm
Thickness of leg	μm
Amount of inclination	μm
Length of pad	μm
Width of pad	μm
Thickness of pad	μm
Height of air	μm
Height of Si3Ni4	μm
Height of substrate	μm