Resonance-Size Parameter Relationship and Dynamics of an AFM Subjected to Multimode Excitation and Based on the Modified Couple Stress Theory
Table 1
Effects of the interacting distance D0, the axial deformation, and the size dependency parameter on the first frequency [SiO2: E = 70.3×109Pa, ρ = 2.5×103 kg/m3, B =45 μm, H = 3.5 μm, L=200 μm, R = ,AH = , and ; the first natural frequency of beam with =0, f1 = 74355.803 Hz, and ].
