Resonance-Size Parameter Relationship and Dynamics of an AFM Subjected to Multimode Excitation and Based on the Modified Couple Stress Theory

Table 2

Effects of the interacting distance D₀, the axial deformation, and the size dependency parameter on the second frequency f₂ [SiO2: E = 70.3×10⁹Pa, ρ = 2.5×10³ kg/m³, B =45 μm, H = 3.5 μm, L=200 μm, R = , A_H = , and ; the first natural frequency of beam with δ=0, f₁ = 74355.803 Hz, and ].

(nm)	f2(Hz)			Error; (%)
	Semianalytical method	Based on (71)
	5	465927.01	488678.25		488668.37	0.0020
6	465983.22	488731.79	488727.32	0.0009
7	466004.20	488751.78	488749.33	0.0005
8	466014.11	488761.27	488759.72	0.0003
9	466019.52	488766.43	488765.40	0.0002
10	466022.69	488769.43	488768.72	0.0001
11	466024.77	488771.43	488770.90	0.0001
12	466026.19	488772.76	488772.39	0.0001
13	466027.02	488773.59	488773.26	0.0001
14	466027.77	488774.26	488774.05	0.0000
15	466028.27	488774.76	488774.57	0.0000
20	466029.52	488775.93	488775.88	0.0000
40	466030.18	488776.44	488776.58	0.0000
80	466030.34	488766.74	488766.74	0.0000