Memetic Variable Clustering and Its Application

Table 5

The performance of semiconductor manufacutring system.

Variable	Performance	Description
Y1	MCT	Mean of wafers’ cycle time
Y2	MCTSTDEV	Standard deviation of wafers’ cycle time
Y3	Productivity	Ratio of output of wafers
Y4	Mov	Total movement of wafers
Y5	Turn	Average movement of wafers
Y6	Utility	Average machine utility of all the machines
Y7	UtilityDF	Average machine utility of the machines located in the diffusion area
Y8	UtilityLT	Average machine utility of the machines located in the lithography area