Analytical Approximate Solution for Nonlinear Behavior of Cantilever FGM MEMS Beam with Thermal and Size Dependency

<table class="fixed-width table-group" id="tab4"><tr><td><table class="table"><colgroup><col style="width:10.19em"/><col style="width:10.19em"/><col style="width:10.19em"/><col style="width:10.19em"/><col style="width:10.19em"/><col style="width:10.19em"/></colgroup><tr><td class="thead-hr" colspan="6"><hr/></td></tr><tr class="thead"><td class="align_left">Type</td><td class="align_center">Ceramic percent of bottom surface (%)</td><td class="align_center"><span style="width: 46.7107ptpx;"><svg height="12.3967pt" id="M101" style="vertical-align:-3.291059pt" version="1.1" viewbox="-0.0498162 -9.10564 46.7107 12.3967" width="46.7107pt" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink"><g transform="matrix(.013,0,0,-0.013,0,0)"><path d="M593 650H142L136 622C219 616 224 611 209 531L130 120C114 39 108 34 23 28L17 0H501C518 32 557 130 568 158L540 169C519 132 495 93 469 70C439 43 409 35 332 35C272 35 241 37 225 50C211 61 211 89 222 149L253 320H350C441 320 443 312 441 239H471L510 434H481C455 366 448 358 360 358H260L303 572C311 613 312 615 348 615H431C509 615 522 603 532 581C544 555 546 531 545 491L574 493C583 555 592 631 593 650Z"></path></g><g transform="matrix(.0091,0,0,-0.0091,7.943,3.132)"><path d="M509 90L493 118C465 91 427 70 418 70S409 77 415 103L469 327C494 429 466 451 436 451C412 451 387 444 356 427C307 400 222 342 160 264H158L246 667C253 701 252 710 243 710C228 710 169 680 87 673L83 644H117C155 644 160 640 149 588L24 -4L32 -12C57 -4 86 4 108 9L143 187C198 275 324 386 375 386C394 386 399 367 385 311L331 87C315 22 322 -12 351 -12C387 -12 452 24 509 90Z"></path></g><g transform="matrix(.013,0,0,-0.013,15.434,.183)"><path d="M300 -147C201 -63 143 98 143 270S200 602 300 686L282 710C136 610 70 450 70 271V270C70 89 136 -72 282 -170L300 -147Z"></path></g><g transform="matrix(.013,0,0,-0.013,19.949,0)"><path d="M692 302H438V274C537 267 543 260 543 188V103C543 61 531 48 511 37C489 26 458 20 424 20C231 20 146 188 146 333C146 517 258 630 411 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110C39 47 88 -12 159 -12C189 -12 237 25 277 52C282 35 288 21 301 8C312 -3 333 -12 348 -12L433 39ZM275 84C256 65 221 48 195 48C164 48 124 73 124 124C124 161 146 180 185 198C206 208 254 229 275 240V84Z"></path></g><g transform="matrix(.013,0,0,-0.013,41.983,.183)"><path d="M275 270C275 450 212 609 64 710L45 686C145 604 203 442 203 270S147 -63 45 -147L64 -170C213 -68 275 89 275 270Z"></path></g></svg></span></td><td class="align_center"><span style="width: 68.6005ptpx;"><svg height="18.3157pt" id="M102" style="vertical-align:-5.8304pt" version="1.1" viewbox="-0.0498162 -12.4853 68.6005 18.3157" width="68.6005pt" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink"><g transform="matrix(.013,0,0,-0.013,0,0)"><path d="M545 106L524 126C493 85 467 65 455 65C438 65 427 113 405 238C448 295 498 362 543 439L533 448L478 435C453 386 423 331 398 295H395C370 404 347 448 282 448C169 448 23 309 23 153C23 54 65 -12 128 -12C203 -12 283 70 339 155H341C360 29 380 -12 411 -12C444 -12 491 11 545 106ZM333 204C265 95 210 54 169 54C137 54 113 96 113 171C113 302 191 405 252 405C301 405 318 306 333 204Z"></path></g><g transform="matrix(.0091,0,0,-0.0091,7.059,3.132)"><path d="M509 90L493 118C465 91 427 70 418 70S409 77 415 103L469 327C494 429 466 451 436 451C412 451 387 444 356 427C307 400 222 342 160 264H158L246 667C253 701 252 710 243 710C228 710 169 680 87 673L83 644H117C155 644 160 640 149 588L24 -4L32 -12C57 -4 86 4 108 9L143 187C198 275 324 386 375 386C394 386 399 367 385 311L331 87C315 22 322 -12 351 -12C387 -12 452 24 509 90Z"></path></g><g transform="matrix(.013,0,0,-0.013,14.55,2.0537e-05)"><path d="M378 -385C239 -253 158 0 158 271S238 795 378 927L356 953C165 798 79 550 79 272V271C79 -10 165 -259 356 -411L378 -385Z"></path></g><g transform="matrix(.013,0,0,-0.013,20.33,0)"><path d="M384 0V27C293 34 287 42 287 114V635C232 613 172 594 109 583V559L157 557C201 555 205 550 205 499V114C205 42 199 34 109 27V0H384Z"></path></g><g transform="matrix(.013,0,0,-0.013,26.57,0)"><path d="M241 635C89 635 35 457 35 312C35 153 89 -12 240 -12C390 -12 443 166 443 312C443 466 390 635 241 635ZM238 602C329 602 354 454 354 312C354 172 330 22 240 22C152 22 124 173 124 313S148 602 238 602Z"></path></g><g transform="matrix(.0091,0,0,-0.0091,32.81,-5.741)"><path d="M556 236V289H56V236H556Z"></path></g><g transform="matrix(.0091,0,0,-0.0091,38.371,-5.741)"><path d="M141 347C171 480 264 541 327 570C364 587 403 599 436 605L429 641C389 634 339 622 300 609C191 570 37 458 37 239C37 86 126 -12 245 -12C367 -12 454 89 454 210C454 314 380 397 272 397C252 397 230 390 208 380L141 347ZM231 338C323 338 366 257 366 174C366 108 340 27 263 27C180 27 129 123 129 244C129 268 130 292 135 310C158 323 193 338 231 338Z"></path></g><g transform="matrix(.013,0,0,-0.013,43.338,0)"><path d="M667 0V28C619 34 599 43 546 100C496 154 386 277 311 372C378 440 449 512 488 547C551 605 575 615 650 622V650H410V622L433 619C478 614 479 604 449 568C404 513 337 443 282 390C254 364 234 350 212 345V520C212 609 222 616 299 622V650H41V622C120 616 128 611 128 520V128C128 41 120 34 44 28V0H304V28C221 34 212 41 212 128V318C229 321 242 318 266 291C355 185 436 87 514 0H667Z"></path></g><g transform="matrix(.0091,0,0,-0.0091,52.087,-5.741)"><path d="M556 236V289H56V236H556Z"></path></g><g transform="matrix(.0091,0,0,-0.0091,57.647,-5.741)"><path d="M389 0V32C297 38 291 46 291 118V635C234 613 175 595 109 583V556L161 554C203 552 207 547 207 497V118C207 46 201 38 110 32V0H389Z"></path></g><g transform="matrix(.013,0,0,-0.013,62.614,2.0537e-05)"><path d="M364 271V272C364 550 278 798 87 953L65 927C205 795 285 542 285 271S204 -253 65 -385L87 -411C278 -259 364 -10 364 271Z"></path></g></svg></span></td><td class="align_center">Status of bottom surface</td><td class="align_center">Status of top surface</td></tr><tr><td class="thead-hr" colspan="6"><hr/></td></tr><tr><td class="align_left">1</td><td class="align_center">0</td><td class="align_center">204</td><td class="align_center">13.2</td><td class="align_center">Metal rich</td><td class="align_center" rowspan="5">Metal rich for all types</td></tr><tr><td class="align_left">2</td><td class="align_center">25</td><td class="align_center">230.5</td><td class="align_center">10.75</td><td class="align_center" rowspan="3">“Mixture of metal and ceramic”</td></tr><tr><td class="align_left">3</td><td class="align_center">50</td><td class="align_center">257</td><td class="align_center">8.3</td></tr><tr><td class="align_left">4</td><td class="align_center">75</td><td class="align_center">283.5</td><td class="align_center">5.85</td></tr><tr><td class="align_left">5</td><td class="align_center">100</td><td class="align_center">310</td><td class="align_center">3.4</td><td class="align_center">Ceramic rich</td></tr><tr class="table-tr"><td colspan="6"><hr class="tbody-hr"/></td></tr></table></td></tr></table>

<div>Properties of 5 cases of FGM microbeams.</div>

Mathematical Problems in Engineering

tab4

Table 4

Table 4: Analytical Approximate Solution for Nonlinear Behavior of Cantilever FGM MEMS Beam with Thermal and Size Dependency 