Research on Two-Stage Joint Optimization Problem of Green Manufacturing and Maintenance for Semiconductor Wafer

Figure 4

Comparison diagrams of Pareto frontier. (a) 10 ∗ 2 ∗ 5 ∗ 5. (b) 30 ∗ 2 ∗ 8 ∗ 9. (c) 40 ∗ 3 ∗ 5 ∗ 10. (d) 50 ∗ 2 ∗ 6 ∗ 11.

(a)

(b)

(c)

(d)