Research on Two-Stage Joint Optimization Problem of Green Manufacturing and Maintenance for Semiconductor Wafer

Table 1

Typical literature about semiconductor manufacturing research.

Literature	Approaches	Objectives
Kim and Lee [6]	Iterative algorithm	Realize the synchronization of production plan and scheduling decision
Bitar et al. [7]	Memetic algorithm	Minimize weighted flow time, maximize the number of processed products
Jamrus et al. [8]	Hybrid algorithm combining particle swarm optimization with Cauchy distribution and genetic algorithm	Minimize makespan
Jia et al. [9]	Improved combined scheduling algorithm	Minimize total weight tardiness
Hur et al. [10]	Greedy random adaptive search algorithm	Maximize weighted throughput during the 2–5 day planning period
Foumani et al. [11–14]	Theoretical analysis, theorem proving and heuristic method	Optimize the scheduling, production and inspection problems of robotic cells in flow shop environment
Tirkel [15]	Quantitative model and sensitivity analysis	Modelling the efficiency of in-line inspection
Ulrich et al. [16]	Probabilistic roadmap method applied on all measurement poses and search algorithm	Finding the optimal path between measurement poses