Research Article
Research on Two-Stage Joint Optimization Problem of Green Manufacturing and Maintenance for Semiconductor Wafer
Table 1
Typical literature about semiconductor manufacturing research.
| Literature | Approaches | Objectives |
| Kim and Lee [6] | Iterative algorithm | Realize the synchronization of production plan and scheduling decision | Bitar et al. [7] | Memetic algorithm | Minimize weighted flow time, maximize the number of processed products | Jamrus et al. [8] | Hybrid algorithm combining particle swarm optimization with Cauchy distribution and genetic algorithm | Minimize makespan | Jia et al. [9] | Improved combined scheduling algorithm | Minimize total weight tardiness | Hur et al. [10] | Greedy random adaptive search algorithm | Maximize weighted throughput during the 2–5 day planning period | Foumani et al. [11–14] | Theoretical analysis, theorem proving and heuristic method | Optimize the scheduling, production and inspection problems of robotic cells in flow shop environment | Tirkel [15] | Quantitative model and sensitivity analysis | Modelling the efficiency of in-line inspection | Ulrich et al. [16] | Probabilistic roadmap method applied on all measurement poses and search algorithm | Finding the optimal path between measurement poses |
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