Research on Two-Stage Joint Optimization Problem of Green Manufacturing and Maintenance for Semiconductor Wafer

Table 13

Pareto optimal solution set obtained by IHMMVO algorithm (part).

	(kgCO2)	(RMB)	(min)	Scheduling scheme
1	2.9 (3.7)	1022 (0)	366 (421)	1-3-8-9-10-6-5-4-2-7
2	2.9 (3.4)	985 (0)	349 (412)	4-3-6-10-5-8-7-1-2-9
3	3.1 (3.5)	847 (0)	355 (404)	4-9-3-5-8-6-7-10-2-1
4	3.2 (3.6)	813 (0)	361 (413)	8-4-3-1-9-7-6-10-5-2
5	3.0 (3.5)	936 (0)	359 (410)	9-3-4-10-2-8-7-1-5-6
6	3.1 (3.4)	1152 (0)	342 (379)	10-6-4-7-5-3-8-1-2-9
7	3.0 (3.2)	884 (0)	364 (389)	1-4-3-5-6-2-9-7-8-10
8	3.0 (3.5)	852 (0)	349 (411)	1-2-3-4-7-5-6-10-8-9
9	3.0 (3.5)	920 (0)	353 (430)	1-2-3-6-5-4-8-7-9-10
10	2.9 (3.3)	1025 (0)	348 (401)	1-3-7-4-5-6-2-8-10-9