Research on Two-Stage Joint Optimization Problem of Green Manufacturing and Maintenance for Semiconductor Wafer

Table 2

Typical literature about RHFS research.

Literature	Approaches	Objectives
Mousavi et al. [18]	Improved genetic algorithm	Minimize makespan and tardiness
Shen et al. [19]	Improved teaching-learning-based algorithm	Minimize makespan and tardiness
Ying et al. [20]	Iterative greedy algorithm	Minimize makespan and tardiness
Zhang and Chen [21]	Improved discrete differential evolution algorithm	Minimize tardiness
Sangsawang et al. [22]	Combining adaptive genetic algorithm based on fuzzy logic controller with particle swarm optimization based on Cauchy distribution	Minimize makespan
Chamnanlor et al. [23]	Hybrid optimization algorithm based on genetic algorithm and ant colony algorithm	Minimize makespan