Research on Two-Stage Joint Optimization Problem of Green Manufacturing and Maintenance for Semiconductor Wafer

Table 3

Typical literature about green manufacturing research.

Literature	Approaches	Objectives
Yin et al. [24]	Multiobjective genetic algorithm based on simplex lattice	Optimize productivity, energy efficiency, and noise reduction
Liu et al. [25]	Improved fruit fly algorithm	Minimize makespan and energy consumption
Sihag and Sangwan [26]	Multiobjective genetic algorithm	Minimize makespan and carbon emissions
Wang et al. [27]	Hybrid tabu search algorithm	Minimize carbon emissions
Foumani and Smith-Miles [28]	CPLEX	Minimize makespan and carbon emissions
Wang and Feng [29]	Improved particle swarm algorithm	Measure the green degree
Zhang et al. [30]	System engineering method	Improve the green rate of manufacturing technology and manufacturing process and reduce the environmental impact rate of resources