Research on Two-Stage Joint Optimization Problem of Green Manufacturing and Maintenance for Semiconductor Wafer

Table 4

Typical literature about PM research.

Literature	Approaches	Objectives
Liu et al. [31]	Genetic algorithm	Minimize the production costs and tardiness costs
Huang and Yu [32]	Cluster particle swarm algorithm	Minimize makespan
Ladj et al. [33]	Improved genetic algorithm	Minimize the total interventions costs
Xiao et al. [34]	Stochastic key genetic algorithm	Minimize the total costs
Golpîra and Tirkolaee [35]	CPLEX	Minimize the total costs of the maintenance and maximize the stability/robustness of the schedule
Goli et al. [36]	CPLEX	Minimize the total-weighted time and the total costs of outsourcing