Research Article

Research on Two-Stage Joint Optimization Problem of Green Manufacturing and Maintenance for Semiconductor Wafer

Table 5

Mathematical notations and meanings.

NotationsMeanings

Total number of jobs
Total number of operations contained in job
Number of stations in manufacturing stage
Serial number of stations in manufacturing stage,
Number of parallel machines at station in manufacturing stage
Serial number of machines at station , ,
Reentry number of job i in manufacturing stage
Number of stations in inspection and repair stage,
Serial number of stations in inspection and repair stage,
Number of parallel machines at station in inspection and repair stage
Serial number of machines at station ,
Reentry number of job in inspection and repair stage
The j-th operation of job
Processing time of on machine at station
Inspection and repair time of on machine at station
A large positive number
Processing power of machine at station
Idle power of machine at station
Idle time of machine at station
Processing power of machine at station
Idle power of machine at station
Idle time of machine at stage
Total carbon emissions from machines processing in manufacturing stage
Total carbon emissions from machines processing in inspection and repair stage
Total carbon emissions from machines in idle state in manufacturing stage
Total carbon emissions from machines in idle state in inspection and repair stage
Total carbon emissions from lubricants used by machines in manufacturing stage
Total carbon emissions from lubricants used by machines in inspection and repair stage
Carbon emission factor of electric energy
The finishing time of machine at station (the finishing time of the last operation on machine )
The start time of machine at station (the start time of the first operation on machine )
The finishing time of machine at station (the finishing time of the last operation on machine )
The start time of machine at station (the start time of the first operation on machine )
The usage amount of lubricants on machine at station
The usage amount of lubricants on machine at station
Effective service time of lubricants on machine at station
Effective service time of lubricants on machine at station
Carbon emissions factor of lubricants
The start time of
The set of all operations processed at station ; due to the reentrant characteristics, the same job may appear multiple times in it
The completion time of job
PM unit activity costs of machine at station
PM fixed costs of machine at station
PM time of machine at station
The idle time of machine at station before the next operation starts processing
1 indicates is processed on machine at stage ; 0 indicates is not processed on machine at stage
1 indicates is inspected or repaired on machine at stage ; 0 indicates is not inspected and repaired on machine at stage
1 indicates is processed before on machine at stage ; 0 indicates is not processed before