Research Article

Research on Two-Stage Joint Optimization Problem of Green Manufacturing and Maintenance for Semiconductor Wafer

Table 6

Related parameters and values.

ParameterValue

Manufacturing stageā€‰
Processing power of machines at each station[6, 5, 4] (kw/h)
Effective use time of lubricants on machines at each station[4.6, 4.3, 4.5] (h)
PM time of three machines at the first station[4, 4, 3] (min)
PM time of two machines at the third station[2, 5] (min)
PM unit activity costs of two machines at the second station[3, 5] (RMB)
PM fixed costs of all machines at each station[10, 12, 11] (RMB)
Degradation factor of the first machine at each station0.1
Degradation factor of the third machine at each station0.2
in failure rate function1.1
Idle power of machines at each station[2, 1.5, 1] (kw/h)
The amount of lubricants used on machines at each station[0.31, 0.32, 0.33] (L)
PM time of two machines at the second station[2, 2] (min)
PM unit activity costs of three machines at the first station[5, 3, 4] (RMB)
PM unit activity costs of two machines at the third station[5, 5] (RMB)
Reliability thresholds of all machines at each station[0.85, 0.8, 0.7]
Degradation factor of the second machine at each station0.15
Regression factor of service age0.9
in failure rate function110

Inspection and repair stageā€‰
Processing power of machines at each station[3, 3] (kw/h)
Effective use time of lubricants on machines at each station[4.1, 4.2] (h)
Idle power of machines at each station[2, 3] (kw/h)
The amount of lubricants used on machines at each station[0.25, 0.24] (L)