Research on Two-Stage Joint Optimization Problem of Green Manufacturing and Maintenance for Semiconductor Wafer

Table 7

Processing time of jobs.

Jobs	Manufacturing stage									Inspection and repair stage
	First processing (the first layer)			First reentry (the second layer)			Second reentry (the third layer)			First route (the first layer)		First reentry (the second layer)
	Stations			Stations			Stations			Stations		Stations
	1	2	3	1	2	3	1	2	3	1	2	1	2
Job1	5	6	4	2	6	8	4	3	6	2	1	2	1
Job2	5	4	13	4	6	7	5	2	3	2	0	1	2
Job3	6	4	3	2	5	7	6	2	0	1	0	2	1
Job4	9	5	8	6	2	5	6	3	4	1	2	2	1