Research on Two-Stage Joint Optimization Problem of Green Manufacturing and Maintenance for Semiconductor Wafer
Table 8
Main parameters and values in the dataset.
Parameter
Value
Number of jobs
10, 20, 30, 40, 50
Number of stations in manufacturing stage
U [4, 6], U [5, 7], U [6, 8]
Processing time of jobs
U [2, 10]
Inspection time of jobs
U [1, 2]
Processing power of machines at each station in manufacturing stage
U [5, 8]
Reliability of machines at each station in manufacturing stage
U [0.4, 0.6]
in failure rate function
1.1
Processing power of machines at each station in inspection and repair stage
U [3, 6]
The amount of lubricants used on machines at each station in manufacturing stage
U [0.2, 0.4]
The amount of lubricants used on machines at each station in inspection and repair stage
U [0.2, 0.4]
PM fixed costs of machines
U [10, 15]
PM time of machines
U [2, 5]
Carbon emissions factor of electric energy
1.8742 × 10−7
Reentry number in manufacturing stage
U [1, 2], U [2, 3]
Number of machines at each station in manufacturing stage
[Number of jobs/5] +1 or +2 or +3
Stations in inspection and repair stage
2
Repair time of jobs
U [0, 2]
Idle power of machines at each station in manufacturing stage
U [1, 5]
Service age regression factor
0.9
in failure rate function
110
Idle power of machines at each station in inspection and repair stage
U [1, 3]
Effective use time of lubricants on machines at each station in manufacturing stage
U [4, 6]
Effective use time of lubricants on machines at each station in inspection and repair stage
U [4, 6]
PM unit activity costs of machines
U [3, 5]
Machine degradation factor
U [0.1, 0.3]
Carbon emissions factor of lubricants
469
Note. Power unit: kw/h; effective service time unit of lubricants: h; usage unit of lubricants: L; processing time, inspection and repair time, and PM time unit: min; costs unit: RMB; carbon emission factor of electric energy unit: kgCO2/J; carbon emission factor of lubricants: kgCO2/m3.
