Research on Two-Stage Joint Optimization Problem of Green Manufacturing and Maintenance for Semiconductor Wafer

Table 9

Main parameters and values of each algorithm.

Parameter	Value
Iteration number	50
(IHMMVO, MMVO)	1
(IHMMVO)	0.95
(IHMMVO, NSGA-II)	0.8
Size of (MOPSO)	50
Learning factor (MOPSO)	1
Number of grids per dimension (MOPSO)	7
	50
(IHMMVO, MMVO)	0.2
(IHMMVO)	0.05
(IHMMVO, NSGA-II)	0.3
Inertia weight (MOPSO)	0.5
Learning factor (MOPSO)	2
Mutation probability (MOPSO)	0.1