Contour Tracking Control Based on Extended State Observer for Multiaxis Motion System

Table 1

Parameters of the 3-axis PMLSM control system.

Parameters	axis	axis	axis
	5.8	5.8	1.4
	10.9	10.9	0.82
	244	244	82
	500	1000	500
	100	150	120
	6	8	9
	11	19	26
	6	12	24
	0.01	0.01	0.01