Investigation on the Characteristics of a Combination Microflow Control Valve

Table 4

The response characteristic of the CMCV with different q_ss.

Pressure step (MPa)	Rise time (ms)			Maximum overshoot (L/min)			Stable time (ms)			Stable flow rate (L/min)
	ls1	tt1		qsmax	qtmax		tss	tts	tvs	qss	qts	qvs
9	1.57	1.58	1.57	5.82	5.89	5.82	10.57	10.15	10.13	2.58	2.61	2.60
12	1.98	2	1.99	5.35	5.41	5.35	10.59	10.16	10.16	2.57	2.61	2.59
15	2.79	2.81	2.8	4.76	4.82	4.76	10.67	10.18	10.18	2.56	2.58	2.57
18	5.15	5.18	5.17	3.94	3.98	3.94	10.94	10.24	10.24	2.53	2.55	2.54

Note. Subscript s in t₁, t_s, q_max, and q_s represents “single-axis,” t represents “three-axis,” and represents “five-axis.”