Research Article
Investigation on the Characteristics of a Combination Microflow Control Valve
Table 4
The response characteristic of the CMCV with different
qss.
| Pressure step (MPa) | Rise time (ms) | Maximum overshoot (L/min) | Stable time (ms) | Stable flow rate (L/min) | ls1 | tt1 | | qsmax | qtmax | | tss | tts | tvs | qss | qts | qvs |
| 9 | 1.57 | 1.58 | 1.57 | 5.82 | 5.89 | 5.82 | 10.57 | 10.15 | 10.13 | 2.58 | 2.61 | 2.60 | 12 | 1.98 | 2 | 1.99 | 5.35 | 5.41 | 5.35 | 10.59 | 10.16 | 10.16 | 2.57 | 2.61 | 2.59 | 15 | 2.79 | 2.81 | 2.8 | 4.76 | 4.82 | 4.76 | 10.67 | 10.18 | 10.18 | 2.56 | 2.58 | 2.57 | 18 | 5.15 | 5.18 | 5.17 | 3.94 | 3.98 | 3.94 | 10.94 | 10.24 | 10.24 | 2.53 | 2.55 | 2.54 |
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Note. Subscript s in t1, ts, qmax, and qs represents “single-axis,” t represents “three-axis,” and represents “five-axis.” |