Multiresponse Optimization for a Novel Compliant Z-Stage by a Hybridization of Response Surface Method and Whale Optimization Algorithm

Figure 10

Six modes of resonant natural frequency of the optimal z-stage: (a) Mode 1: resonant frequency of 336.11 Hz; (b) Mode 2: resonant frequency of 589.53 Hz; (c) Mode 3: resonant frequency of 594.75 Hz; (d) Mode 4: resonant frequency of 596.36 Hz; (e) Mode 5: resonant frequency of 601.63 Hz; (f) Mode 6: resonant frequency of 605.49 Hz.

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