Multiresponse Optimization for a Novel Compliant Z-Stage by a Hybridization of Response Surface Method and Whale Optimization Algorithm

Table 1

Geometric factors of the compliant z-stage.

Factor	Worth	Factor	Worth	Factor	Worth	Unit
A	114.5	J	6.5	i	15	mm
B	301	K	3.5	t	15	mm
C	60	M	32.5	u	73	mm
D	20	N	16	M	0.55 ≤ M ≤ 0.65	mm
E	17	O	1	N	0.6 ≤ N ≤ 0.9	mm
F	21	Q	8	P	0.9 ≤ P ≤ 1.2	mm
G	5	R	8	K	49 ≤ K ≤ 53	mm
H	22	S	35