Multiresponse Optimization for a Novel Compliant Z-Stage by a Hybridization of Response Surface Method and Whale Optimization Algorithm

Table 2

The output deformation, magnification, safety factor, and stress.

Input displacement (μm)	Output deformation (μm)	Magnification scale	Safety factor	Equivalent stress
				(MPa)
65	387	5.95	1.8092	278.02
70	416.77	5.95	1.68	299.41
75	446.54	5.95	1.568	320.8
80	476.31	5.95	1.47	342.18
85	506.07	5.95	1.3835	363.57
90	535.84	5.95	1.3066	384.96
95	565.61	5.95	1.2379	406.34
100	595.38	5.95	1.176	427.73
105	625.15	5.95	1.12	449.12
110	654.92	5.95	1.0691	470.5
115	684.69	5.95	1.0226	491.89
120	714.46	5.95	0.97998	513.28